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Gas-Flow-Sensors

FS5001L

Specification

Category: Gas-Massflow-Sensors
Manufacturer: Siargo
Measuring range: 1 ~ 6000 mln/min
Temp. range: -10~55 C°
Pressure range: -0.8~5 bar
Pressure drop: max. 9 mbar max. (@1000 sccm), max. 35 mbar (@6000 sccm)
Power supply: 8 ~ 24 VDC, 50 mA
Input signal: -
Output signal: 0,5 - 4,5 VDC (linear), I2C
Process connection: Flanged with O-ring seal
Special features:
  • Low mass flow: 0 - 200/500/1000/4000/6000 sccm/min (Air, 20°C, 1013.25 mbar)
  • Response time < 10 - 1000 msec selectable
  • Pressure rating up to 5 bar (73 psi)
  • Output: analog 0.5 to 4.5 VDC or both analog and digital
  • Fully customizable at low cost
Media: Gases: Air, CO2, He, H2, N2, O2, Ar
Accuracy: ±(2.0 oR + 0.5 FS)%
Repeatability: ±0.5 %
Response time: 10 ms (possible setting: 10, 20, 50, 100, 200, 500, 1000 ms)
Turn-Down-Ratio: 100:1
Display: 0

Description

The FS5001L series mass flow sensors are designed for general purpose flow monitoring and control applications. The sensors directly measure mass flow in the designed channel with trace flow detection capability down to 20 µL/min. These sensors can readily be applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen flush monitoring and control, environmental equipments such as air sampler and analytical instrumentation such as GC spectrometer. FS5001L can be configured to measure flow full scale from 200 sccm to 6000 sccm (6 SLPM):
  • FS5001L-200-...: 0 - 200 mln/min (Air, 20°C, 1013.25 mbar)
  • FS5001L-500-...: 0 - 500 mln/min (Air, 20°C, 1013.25 mbar)
  • FS5001L-1000-...: 0 - 1000 mln/min (Air, 20°C, 1013.25 mbar)
  • FS5001L-4000-...: 0 - 4000 mln/min (Air, 20°C, 1013.25 mbar)
  • FS5001L-6000-...: 0 - 6000 mln/min (Air, 20°C, 1013.25 mbar)
With a full spectrum of customizable adaptors, it can be plug-and-play in many applications

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