The MF4000 series mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and package technology. The sensors are housed in Ø 3 mm and Ø 8 mm pipes with maximum flow rate 5 SLPM and 50 SLPM, respectively:
- MF4003: Ø3 mm: 0 ~ 2, 3, 4, 5 Sl/min (Sl: 1013,25 mbar, 20°C)
- MF4008: Ø8 mm: 0 ~ 10, 20, 30, 40, 50 Sl/min (Sl: 1013,25 mbar, 20°C)
The MF4000 series have an LED-Display with three push bottoms to select alternatively the instant flow rate, the accumulated flow rate or the last maximum and minimum flow rate value. The display output can be changed by bottom or by RS232 which also allows setting of the response time, display refresh rate, gas change with gas correction factors or a zero adjustment at zero flow.
Each model is manufactured via specially designed package and smart electronics so that the optimal sensitivity is given. The packaging enclosure is made of the chemically inert and thermally stable polycarbonate material. The maximum over pressure rating can reach up to 5 bar (73 psi) that is benefitted from Siargo's unique MEMS sensor chip structure, special packaging technology and the rugged sensor housing. The MF4000 series are EMC-tested in accordance with EMC directive 89/336/EEC an show strong properties regarding electromagnetic compatibility.
The mechanical structure of MF4000 series is designed for easy assembly as manifold for process gas monitoring and control. Applications include leakage detection, particle counter, analytical instrumentation, anesthesia equipment, clean room gas flow monitoring, air sampler and gas analyzer. The FS4000 sensors require a power supply of 8 ~ 24 Vdc and provide an analog output or both an analog and a digital output. The analog output is linearized from 0.5 Vdc to 4.5 Vdc corresponding with flow rate from 0 to full scale.