Category: Gas-Massflow-Sensors
Manufacturer: Siargo
Measuring range: ± (0.3 ~ 1000) mls/min
Temp. range: -5~55 C°
Pressure range: -0.8~5 bar
Pressure drop: 3 mbar max. (@1000 sccm)
Power supply: 8-18 VDC, 50 mA
Input signal: -
Output signal: Analog: 0.5 – 4.5 VDC (linear), RS232 or I2C
Process connection: Schlauchtülle Da: Ø 5,2 mm
Special features:
  • Measurement of small flow rates from 0~30 sccm to 0~1000 sccm
  • Very low pressure drop: FS4001-1000-...: 30Pa @ 1000sccm; FS4001-200-...: 20Pa @ 200sccm
  • Optional bi-directional calibration possible (e.g. -100 ~ +100 sccm)
  • High accuracy: ±(1.5 oR + 0.5 FS)%
  • Extreme fast response time: 4 ms (4 to 131 ms can be set via RS232)
  • max. working pressure up to 5 bar (73 psi)
  • Linear Analog output signal (0.5-4.5 VDC) and digital Interface (I2C, RS232) with 12 bit resolution
  • Easy mounting and implementation
  • Real gas calibration option
Media: Gases: Air, CO2, He, H2, N2, O2, Ar
Accuracy: ±(1.5 oR + 0.5 FS) %
Repeatability: ±0.25 oR
Response time: 65 ms (possible setting: 4, 8, 16, 33, 131 ms)
Turn-Down-Ratio: >100:1
Display: None


The FS4001-Series gas massflow sensors are specially designed for low flow rate range applications from 0 ~ 1000 sccm. They are available in five standard flow ranges (bi-directional on request):
  • 0 ~ 30/100/200/500/1000 sccm/min
The maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved. The packaging enclosure is made of the chemically inert and thermally stable polycarbonate material. The maximum over pressure rating is 5 bar (73 psi) that is benefitted from Siargo’s unique MEMS sensor chip structure, special packaging technology and the rugged sensor housing. The FS4001 can be used in a wide range of applications including instrumentation (e.g. GC mass spectrometry), leak detection, process control, gas flow metrology as well as medical applications. The FS4001 requires a power supply of 8~18 VDC and provides an analog and/or digital user interface. The analog 12 bit output is linearized from 0.5 to 4.5 Vdc corresponding with flow rate from 0 to full scale. The digital output is via RS232 or I2C which also allow the setting of the response time from 4 ms to 131 ms or changing the gas type with a gas correction factor. A very low pressure lost shows another USP of this sensors:
  • FS4001...30/100/200 ml/min: 20Pa @ 200scc
  • FS4001... 500/1000 ml/min: 30Pa @ 1000sccm
The calibration is generally performed with nitrogen at 20°C and 101.325 kPa pressure rating. We provide realgas calibration as option.