The FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and package technology. The products are designed for reliability with excellent performance in targeted applications. The sensors are housed in Ø 3 mm and Ø 8 mm pipes with maximum flow rate 5 SLPM and 50 SLPM, respectively:
- FS4003: Ø3 mm: 0 ~ 2, 3, 4, 5 Sl/min (Sl: 1013,25 mbar, 20°C)
- FS4008: Ø8 mm: 0 ~ 10, 20, 30, 40, 50 Sl/min (Sl: 1013,25 mbar, 20°C)
Each model is manufactured via specially designed package and smart electronics so that the optimal sensitivity would be achieved. The packaging enclosure is made of the chemically inert and thermally stable polycarbonate material. The maximum over pressure rating can reach up to 5 bar (73 psi) that is benefitted from Siargo's unique MEMS sensor chip structure, special packaging technology and the rugged sensor housing. The FS4000 series are EMC-tested in accordance with EMC directive 89/336/EEC an show strong properties regarding electromagnetic compatibility.
The mechanical structure of FS4000 series is designed for easy assembly as manifold for process gas monitoring and control. Applications include leakage detection, particle counter, analytical instrumentation, anesthesia equipment, clean room gas flow monitoring, air sampler and gas analyzer. The FS4000 sensors require a power supply of 8 ~ 24 Vdc and provide an analog output or both an analog and digital outputs. The analog output is linearized from 0.5 Vdc to 4.5 Vdc corresponding with flow rate from 0 to full scale.